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@article{TUW-111354,
    author = {Holzer, Stefan and Sheikholeslami, Alireza and Karner, Markus and Grasser, Tibor and Selberherr, Siegfried},
    title = {{C}omparison of {D}eposition {M}odels for a {T}{E}{O}{S} {L}{P}{C}{V}{D} {P}rocess},
    journal = {{M}icroelectronics {R}eliability},
    year = {2007},
    volume = {47},
    number = {4-5},
    pages = {623--625},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2007/JB2007_Holzer_1.pdf},
    doi = {10.1016/j.microrel.2007.01.058}
}