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@unpublished{TUW-111461,
    author = {Cervenka, Johann and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {S}acri{\&}{\#}64257;cial {E}tching},
    year = {2007},
    note = {talk: {S}{P}{I}{E} {S}mart {S}ensors, {A}ctuators, and {M}{E}{M}{S}, {M}asapalomas, {S}pain; 2007-05-02 -- 2007-05-04}
}