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@phdthesis{TUW-111640,
    author = {Pichler, P.},
    title = {{N}umerische {S}imulation kritischer {P}roze{\ss}schritte in der {H}albleitertechnik},
    school = {{I}nstitut f{\"u}r {A}llgemeine {E}lektrotechnik und {E}lektronik},
    year = {1985}
}



Created from the Publication Database of the Vienna University of Technology.