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@phdthesis{TUW-111643,
    author = {Lorenz, J.},
    title = {{D}iskretisierung und {G}ittergeneration f{\"u}r die mehrdimensionale {S}imulation von {I}mplantation und {D}iffusion},
    school = {{F}riedrich-{A}lexander-{U}niversit{\"a}t {E}rlangen-{N}{\"u}rnberg und {I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2000}
}



Created from the Publication Database of the Vienna University of Technology.