@article{TUW-111716, author = {Wittmann, Robert and Selberherr, Siegfried}, title = {{A} {S}tudy of {I}on {I}mplantation into {C}rystalline {G}ermanium}, journal = {{S}olid-{S}tate {E}lectronics}, year = {2007}, volume = {51}, number = {6}, pages = {982--988}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2008/JB2007_Wittmann_1.pdf}, doi = {10.1016/j.sse.2007.03.019} }