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@phdthesis{TUW-111979,
    author = {Kim, Heung Bae},
    title = {{D}esign, simulation and fabrication of micro/nano functional structures using {I}{O}{N} beams},
    school = {{I}nstitut f{\"u}r {F}estk{\"o}rperelektronik},
    year = {2007}
}



Created from the Publication Database of the Vienna University of Technology.