@phdthesis{TUW-111979, author = {Kim, Heung Bae}, title = {{D}esign, {S}imulation and {F}abrication of {M}icro/{N}ano {F}unctional {S}tructures {U}sing {I}{O}{N} {B}eams}, school = {{I}nstitut f{\"u}r {F}estk{\"o}rperelektronik}, year = {2007} }