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@mastersthesis{TUW-112278,
    author = {Slama, Karl},
    title = {{S}imulation der {I}onenimplantation von {B}or in {S}iliziumeinkristallen bei niedrigen {E}nergien},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1988}
}



Created from the Publication Database of the Vienna University of Technology.