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@mastersthesis{TUW-112279,
    author = {Halama, Stefan},
    title = {{U}ntersuchung der thermischen {O}xidation von {S}ilicium mit {H}ilfe molekulardynamischer {S}imulationsmethoden},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {1989}
}



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