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@techreport{TUW-112498,
    author = {Fasching, Franz and Halama, Stefan and Pichler, Christoph and Pimingstorfer, Hubert and Rieger, Gerhard and Schrom, Gerhard and Selberherr, Siegfried and Stiftinger, Martin},
    title = {{V}{I}{S}{T}{A} {S}tatus {R}eport {I}},
    institution = {{E}360 - {I}nstitute for {M}icroelectronics; {V}ienna {U}niversity of {T}echnology},
    year = {1993}
}



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