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@inproceedings{TUW-166678,
    author = {Ertl, Otmar and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {T}opography {S}imulation {U}sing {A}dvanced {L}evel {S}et and {R}ay {T}racing {M}ethods},
    booktitle = {{P}roceedings of the 13th {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2008},
    pages = {325--328},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2009/CP2008_Ertl_1.pdf},
    isbn = {978-1-4244-1753-7},
    doi = {10.1109/SISPAD.2008.4648303},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {H}akone, {J}apan; 2008-09-09 -- 2008-09-11}
}



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