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@inproceedings{TUW-178020,
    author = {Ertl, Otmar and Selberherr, Siegfried},
    title = {{A} {F}ast {V}oid {D}etection {A}lgorithm for {T}hree-{D}imensional {D}eposition {S}imulation},
    booktitle = {{P}roceedings of the 14th {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2009},
    pages = {174--177},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2009/CP2009_Ertl_1.pdf},
    isbn = {978-1-4244-3947-8},
    doi = {10.1109/SISPAD.2009.5290221},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {S}an {D}iego, {C}{A}, {U}{S}{A}; 2009-09-09 -- 2009-09-11}
}



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