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@inproceedings{TUW-188068,
    author = {Ertl, Otmar and Filipovic, Lado and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {S}imulation of {F}ocused {I}on {B}eam {P}rocessing {U}sing the {L}evel {S}et {M}ethod},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2010},
    pages = {49--52},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2010/CP2010_Ertl_1.pdf},
    isbn = {978-1-4244-7700-5},
    doi = {10.1109/SISPAD.2010.5604573},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {B}ologna, {I}taly; 2010-09-06 -- 2010-09-08}
}



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