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@phdthesis{TUW-188686,
    author = {Aichinger, T.},
    title = {{O}n the {R}ole of {H}ydrogen in {S}ilicon {D}evice {D}egradation and {M}etalization {P}rocessing},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2010},
    url = {http://www.iue.tuwien.ac.at/phd/aichinger/},
    doi = {10.34726/hss.2010.20283}
}