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@inproceedings{TUW-198951,
    author = {Filipovic, Lado and Selberherr, Siegfried},
    title = {{A} {L}evel {S}et {S}imulator for {N}anooxidation using {N}on-{C}ontact {A}tomic {F}orce {M}icroscopy},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2011},
    pages = {307--310},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2011/CP2011_Filipovic_2.pdf},
    isbn = {978-1-61284-418-3},
    doi = {10.1109/SISPAD.2011.6035031},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {O}saka, {J}apan; 2011-09-08 -- 2011-09-10}
}