@mastersthesis{TUW-203887, author = {Waltl, Michael}, title = {{C}hange {P}oint {D}etection in {T}ime {D}ependent {D}efect {S}pectroscopy {D}ata}, school = {{I}nstitut f{\"u}r {M}ikroelektronik}, year = {2011} }