[Back]

@inproceedings{TUW-209742,
    author = {Filipovic, Lado and Selberherr, Siegfried},
    title = {{S}imulations of {L}ocal {O}xidation {N}anolithography by {A}{F}{M} {B}ased on the {G}enerated {E}lectric {F}ield},
    booktitle = {{P}roceedings of the 17th {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2012},
    pages = {189--192},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2012_Filipovic_1.pdf},
    isbn = {978-0-615-71756-2},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {D}enver, {C}{O}, {U}{S}{A}; 2012-09-05 -- 2012-09-07}
}



Created from the Publication Database of the Vienna University of Technology.