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@inproceedings{TUW-209877,
    author = {Filipovic, Lado and Selberherr, Siegfried},
    title = {{E}lectric {F}ield {B}ased {S}imulations of {L}ocal {O}xidation {N}anolithography using {A}tomic {F}orce {M}icroscopy in a {L}evel {S}et {E}nvironment},
    booktitle = {{E}{C}{S} {T}ransactions},
    year = {2012},
    pages = {265--272},
    publisher = {49},
    address = {1},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2012_Filipovic_2.pdf},
    isbn = {978-1-56677-990-6},
    doi = {10.1149/04901.0265ecst},
    note = {talk: {I}ntl. {S}ymposium on {M}icroelectronics {T}echnology and {D}evices ({S}{B}{M}icro), {B}rasilia, {B}razil; 2012-08-30 -- 2012-09-02}
}



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