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@inproceedings{TUW-217815,
    author = {Schrems, Martin and Schrank, Clemens and Siegert, Joerg and Kraft, J. and Teva, Jordi and Selberherr, Siegfried},
    title = {{M}etrology {R}equirements for {M}anufacturing 3{D} {I}ntegrated {I}{C}s},
    booktitle = {{P}roceedings {I}nternational {C}onference on {F}rontiers of {C}haracterization and {M}etrology for {N}anoelectronics ({F}{C}{M}{N})},
    year = {2013},
    pages = {137--139},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2013_Selberherr_1.pdf},
    note = {invited; talk: {I}nternational {C}onference on {F}rontiers of {C}haracterization and {M}etrology for {N}anoelectronics ({F}{C}{M}{N}), {G}aithersburg, {U}{S}{A}; 2013-03-25 -- 2013-03-28}
}