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@phdthesis{TUW-217876,
    author = {Huang, Rui},
    title = {{S}tress and {M}icrostructural {E}volution of {E}lectroplated {C}opper {F}ilms},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2013}
}