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@inproceedings{TUW-219746,
    author = {Filipovic, Lado and Selberherr, Siegfried and Mutinati, G. C. and Brunet, E. and Steinhauer, S. and K{\"o}ck, Anton and Teva, Jordi and Kraft, J. and Siegert, Joerg and Schrank, F. and Gspan, Christian and Grogger, Werner},
    title = {{M}odeling the {G}rowth of {T}hin {S}n{O}2 {F}ilms using {S}pray {P}yrolysis {D}eposition},
    booktitle = {{P}roceedings of the 18th {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2013},
    pages = {208--211},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Filipovic_2.pdf},
    isbn = {978-1-4673-5733-3},
    doi = {10.1109/SISPAD.2013.6650611},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {G}lasgow, {S}cotland, {U}nited {K}ingdom; 2013-09-03 -- 2013-09-05}
}



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