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@inproceedings{TUW-219757,
    author = {Singulani, Anderson P. and Ceric, Hajdin and Selberherr, Siegfried},
    title = {{S}tress {E}stimation in {O}pen {T}ungsten {T}{S}{V}},
    booktitle = {{P}roceedings of the 18th {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2013},
    pages = {65--68},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Singulani_1.pdf},
    isbn = {978-1-4673-5733-3},
    doi = {10.1109/SISPAD.2013.6650575},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {G}lasgow, {S}cotland, {U}nited {K}ingdom; 2013-09-03 -- 2013-09-05}
}



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