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@inproceedings{TUW-222504,
    author = {Singulani, Anderson P. and Ceric, Hajdin and Langer, Erasmus and Carniello, Sara},
    title = {{E}ffects of {B}osch scallops on metal layer stress of an open {T}hrough {S}ilicon {V}ia technology},
    booktitle = {{C}onference {P}roceedings of {I}nternational {R}eliability {P}hysics {S}ymposium ({I}{R}{P}{S} 2013)},
    year = {2013},
    pages = {CP.2.1--CP.2.5},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Singulani_3.pdf},
    isbn = {978-1-4799-0112-8},
    doi = {10.1109/IRPS.2013.6532066},
    note = {poster presentation: {I}nternational {R}eliability {P}hysics {S}ymposium ({I}{R}{P}{S}), {M}onterey, {C}{A}, {U}{S}{A}; 2013-04-14 -- 2013-04-18}
}



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