@article{TUW-228521,
author = {Filipovic, Lado and Selberherr, Siegfried and Mutinati, G. C. and Brunet, E. and Steinhauer, S. and K{\"o}ck, Anton and Teva, Jordi and Kraft, J. and Siegert, Joerg and Schrank, F. and Gspan, Christian and Grogger, Werner},
title = {{M}odeling the {G}rowth of {T}in {D}ioxide using {S}pray {P}yrolysis {D}eposition for {G}as {S}ensor {A}pplications},
journal = {{I}{E}{E}{E} {T}ransactions on {S}emiconductor {M}anufacturing},
year = {2014},
volume = {27},
number = {2},
pages = {269--277},
url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/JB2014_Filipovic_2.pdf},
doi = {10.1109/TSM.2014.2298883}
}
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