[Back]

@inproceedings{TUW-230035,
    author = {Filipovic, Lado and Orio, Roberto and Selberherr, Siegfried},
    title = {{E}ffects of {S}idewall {S}callops on the {P}erformance and {R}eliability of {F}illed {C}opper and {O}pen {T}ungsten {T}{S}{V}s},
    booktitle = {{P}roceedings of the 21st {I}nternational {S}ymposium on the {P}hysical and {F}ailure {A}nalysis of {I}ntegrated {C}ircuits},
    year = {2014},
    pages = {321--326},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2014_Filipovic_7.pdf},
    isbn = {978-1-4799-3931-2},
    doi = {10.1109/IPFA.2014.6898137},
    note = {talk: {I}nternational {S}ymposium on the {P}hysical and {F}ailure {A}nalysis of {I}ntegrated {C}ircuits ({I}{P}{F}{A}), {S}ingapore, {S}ingapore; 2014-06-30 -- 2014-07-04}
}



Created from the Publication Database of the Vienna University of Technology.