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@inproceedings{TUW-231543,
    author = {Schrems, Martin and Siegert, Joerg and Dorfi, P. and Kraft, J. and Stueckler, E. and Schrank, F. and Selberherr, Siegfried},
    title = {{M}anufacturing of 3{D} {I}ntegrated {S}ensors and {C}ircuits},
    booktitle = {{P}roceedings of the 44\textsuperscript{th} {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference},
    year = {2014},
    pages = {162--165},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2014_Selberherr_1.pdf},
    isbn = {978-1-4799-4377-7},
    doi = {10.1109/ESSDERC.2014.6948785},
    note = {invited; talk: {E}uropean {S}olid-{S}tate {D}evice {R}esearch {C}onference ({E}{S}{S}{D}{E}{R}{C}), {V}enice, {I}taly; 2014-09-22 -- 2014-09-26}
}



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