[Zurück]

@inproceedings{TUW-233376,
    author = {Papaleo, Santo and Zisser, Wolfhard and Singulani, Anderson P. and Ceric, Hajdin and Selberherr, Siegfried},
    title = {Stress Evolution During the Nanoindentation in Open TSVs},
    booktitle = {Abstracts of 13th International Workshop on Stress-Induced Phenomena in Microelectronics},
    year = {2014},
    pages = {44},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/CP2014_Papaleo_2.pdf},
    note = {Posterpr{\"a}sentation: International Workshop on Stress-Induced Phenomena in Microelectronics, Austin, TX, USA; 2014-10-15 -- 2014-10-17}
}



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