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@article{TUW-238355,
    author = {Baer, Eberhard and Evanschitzky, P. and Lorenz, J. and Roger, Frederic and Minixhofer, R. and Filipovic, Lado and Lacerda de Orio, Roberto and Selberherr, Siegfried},
    title = {{C}oupled {S}imulation to {D}etermine the {I}mpact of {A}cross {W}afer {V}ariations in {O}xide {P}{E}{C}{V}{D} on {E}lectrical and {R}eliability {P}arameters of {T}hrough-{S}ilicon {V}ias},
    journal = {{M}icroelectronic {E}ngineering},
    year = {2015},
    volume = {137},
    pages = {141--145},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2014/JB2015_Selberherr_1.pdf},
    doi = {10.1016/j.mee.2014.11.014}
}



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