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@inproceedings{TUW-239228,
    author = {Kirchauer, Heinrich and Selberherr, Siegfried},
    title = {{A} {T}hree-{D}imensional {P}hotolithography {S}imulator {I}ncluding {R}igorous {N}onplanar {E}xposure {S}imulation for {O}ff-{A}xis {I}llumination},
    booktitle = {{P}roceedings of {S}{P}{I}{E} {O}ptical {M}icrolithography},
    year = {1998},
    pages = {333486},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_1998/CP1998_Kirchauer_2.pdf},
    note = {poster presentation: {S}{P}{I}{E} {O}ptical {M}icrolithography, {S}anta {C}lara, {C}{A}, {U}{S}{A}; 1998-02-22 -- 1998-02-27}
}



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