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@inproceedings{TUW-241243,
    author = {Rzepa, Gerhard and Waltl, Michael and G{\"o}s, Wolfgang and Kaczer, Ben and Grasser, Tibor},
    title = {{M}icroscopic {O}xide {D}efects {C}ausing {B}{T}{I}, {R}{T}{N}, and {S}{I}{L}{C} on {H}igh-{K} {F}in{F}{E}{T}s},
    booktitle = {{P}roceedings of the 20\textsuperscript{th} {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2015},
    pages = {144--147},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2015/CP2015_Rzepa_1.pdf},
    isbn = {978-1-4673-7860-4},
    doi = {10.1109/SISPAD.2015.7292279},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {W}ashington {D}{C}, {U}{S}{A}; 2015-09-09 -- 2015-09-11}
}



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