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@inproceedings{TUW-247958,
    author = {Simonka, Vito and Nawratil, Georg and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried},
    title = {{G}eometrical {A}spects of {T}hree-{D}imensional {S}ilicon {C}arbide {O}xidation {G}rowth {R}ate {M}odeling},
    booktitle = {{B}ook of {A}bstracts of the 2016 {J}oint {I}nternational {E}{U}{R}{O}{S}{O}{I} {W}orkshop and {I}nternational {C}onference on {U}ltimate {I}ntegration on {S}ilicon},
    year = {2016},
    pages = {128--129},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2015/CP2016_Simonka_1.pdf},
    isbn = {978-3-901578-29-8},
    note = {poster presentation: {J}oint {I}nternational {E}{U}{R}{O}{S}{O}{I} {W}orkshop and {I}nternational {C}onference on {U}ltimate {I}ntegration on {S}ilicon ({E}{U}{R}{O}{S}{O}{I}-{U}{L}{I}{S}), {W}ien; 2016-01-25 -- 2016-01-27}
}



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