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@incollection{TUW-248726,
    author = {Simonka, Vito and Nawratil, Georg and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried},
    title = {{D}irection {D}ependent {T}hree-{D}imensional {S}ilicon {C}arbide {O}xidation {G}rowth {R}ate {C}alculations},
    booktitle = {{P}roceedings of the 2016 {J}oint {I}nternational {E}{U}{R}{O}{S}{O}{I} {W}orkshop and {I}nternational {C}onference on {U}ltimate {I}ntegration on {S}ilicon ({E}{U}{R}{O}{S}{O}{I}-{U}{L}{I}{S})},
    year = {2016},
    pages = {226--229},
    publisher = {{I}{E}{E}{E} {X}plore},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2015/CP2016_Simonka_2.pdf},
    isbn = {978-1-4673-8608-1},
    doi = {10.1109/ULIS.2016.7440094}
}



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