@article{TUW-249728, author = {Filipovic, Lado and Selberherr, Siegfried}, title = {{S}tress in {T}hree-{D}imensionally {I}ntegrated {S}ensor {S}ystems}, journal = {{M}icroelectronics {R}eliability}, year = {2016}, volume = {61}, pages = {3--10}, url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/JB2016_Filipovic_1.pdf}, doi = {10.1016/j.microrel.2015.09.013} }