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@inproceedings{TUW-251399,
    author = {Simonka, Vito and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried},
    title = {{T}hree-{D}imensional {G}rowth {R}ate {M}odeling and {S}imulation of {S}ilicon {C}arbide {T}hermal {O}xidation},
    booktitle = {{P}roceedings of the 21\textsuperscript{st} {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices},
    year = {2016},
    pages = {233--236},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/CP2016_Simonka_1.pdf},
    isbn = {978-1-5090-0817-9},
    doi = {10.1109/SISPAD.2016.7605190},
    note = {poster presentation: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {N}{\"u}rnberg, {D}eutschland; 2016-09-06 -- 2016-09-08}
}



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