[Zurück]

@article{TUW-253595,
    author = {Papaleo, Santo and Zisser, Wolfhard and Singulani, Anderson P. and Ceric, Hajdin and Selberherr, Siegfried},
    title = {Stress Evolution During Nanoindentation in Open TSVs},
    journal = {IEEE Transactions on Device and Materials Reliability},
    year = {2016},
    volume = {16},
    number = {4},
    pages = {470--474},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/JB2016_Papaleo_1.pdf},
    doi = {10.1109/TDMR.2016.2622727}
}



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