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@article{TUW-255011,
    author = {Simonka, Vito and Nawratil, Georg and H{\"o}ssinger, Andreas and Weinbub, Josef and Selberherr, Siegfried},
    title = {{A}nisotropic {I}nterpolation {M}ethod of {S}ilicon {C}arbide {O}xidation {G}rowth {R}ates for {T}hree-{D}imensional {S}imulation},
    journal = {{S}olid-{S}tate {E}lectronics},
    year = {2017},
    volume = {128},
    number = {2},
    pages = {135--140},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2016/JB2016_simonka_2.pdf},
    doi = {10.1016/j.sse.2016.10.032},
    note = {invited}
}