author = {Gillinger, Manuel and Shaposhnikov, Kirill and Knobloch, Theresia and Schneider, Michael and Kaltenbacher, Manfred and Schmid, Ulrich},
    title = {{I}mpact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based {S}{A}{W} devices on sapphire},
    journal = {{A}pplied {P}hysics {L}etters},
    year = {2016},
    volume = {108},
    pages = {231601-1--231601-4},
    doi = {10.1063/1.4953259}

Created from the Publication Database of the Vienna University of Technology.