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@incollection{TUW-269975,
    author = {Klemenschits, Xaver and Selberherr, Siegfried and Filipovic, Lado},
    title = {{U}nified {F}eature {S}cale {M}odel for {E}tching in {S}{F}6 and {C}l {P}lasma {C}hemistries},
    booktitle = {{P}roceedings of the 2018 {J}oint {I}nternational {E}{U}{R}{O}{S}{O}{I} {W}orkshop and {I}nternational {C}onference on {U}ltimate {I}ntegration on {S}ilicon ({E}{U}{R}{O}{S}{O}{I}-{U}{L}{I}{S})},
    year = {2018},
    editor = {Gamiz, Francisco and Sverdlov, Viktor and Sampedro, Carlos and Donetti, Luca},
    pages = {177--180},
    publisher = {{I}{E}{E}{E} {X}plore},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/CP2018_Klemenschits_1.pdf},
    isbn = {978-1-5386-4812-4},
    doi = {10.1109/ULIS.2018.8354763}
}



Created from the Publication Database of the Vienna University of Technology.