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@inproceedings{TUW-270040,
    author = {Klemenschits, Xaver and Selberherr, Siegfried and Filipovic, Lado},
    title = {{U}nified {F}eature {S}cale {M}odel for {E}tching in {S}{F}6 and {C}l {P}lasma {C}hemistries},
    booktitle = {{B}ook of {A}bstracts of the 2018 {J}oint {I}nternational {E}{U}{R}{O}{S}{O}{I} {W}orkshop and {I}nternational {C}onference on {U}ltimate {I}ntegration on {S}ilicon},
    year = {2018},
    pages = {65--66},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2018/CP2018_Klemenschits_2.pdf},
    isbn = {978-1-5386-4810-0},
    note = {poster presentation: {J}oint {I}nternational {E}{U}{R}{O}{S}{O}{I} {W}orkshop and {I}nternational {C}onference on {U}ltimate {I}ntegration on {S}ilicon ({E}{U}{R}{O}{S}{O}{I}-{U}{L}{I}{S}), {G}ranada, {S}pain; 2018-03-19 -- 2018-03-21}
}



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