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@mastersthesis{TUW-272756,
    author = {Toifl, Alexander},
    title = {{M}odeling and {S}imulation of {T}hermal {A}nnealing of {I}mplanted {G}a{N} and {S}i{C}},
    school = {{E}360},
    year = {2018}
}



Created from the Publication Database of the Vienna University of Technology.