author = {Gillinger, Manuel and Shaposhnikov, Kirill and Knobloch, Theresia and St{\"o}ger-Pollach, Michael and Artner, Werner and Hradil, Klaudia and Schneider, Michael and Kaltenbacher, Manfred and Schmid, Ulrich},
    title = {{E}nhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for {S}{A}{W} applications},
    journal = {{A}pplied {S}urface {S}cience},
    year = {2018},
    volume = {435},
    pages = {432--437},
    doi = {10.1016/j.apsusc.2017.11.113}

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