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@phdthesis{TUW-273755,
    author = {Simonka, Vito},
    title = {{T}hermal {O}xidation and {D}opant {A}ctivation of {S}ilicon {C}arbide},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2018},
    url = {http://www.iue.tuwien.ac.at/phd/simonka/}
}



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