author = {Woerle, J. and Simonka, Vito and M{\"u}ller, E. and H{\"o}ssinger, Andreas and Sigg, H. and Selberherr, Siegfried and Weinbub, Josef and Camarda, M. and Grossner, Ulrike},
    title = {{S}urface {M}orphology of 4{H}-{S}i{C} {A}fter {T}hermal {O}xidation},
    booktitle = {{P}roceedings of the {E}uropean {C}onference on {S}ilicon {C}arbide and {R}elated {M}aterials ({E}{C}{S}{C}{R}{M})},
    year = {2018},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2019/CP2018_Woerle_1.pdf},
    note = {talk: {E}uropean {C}onference on {S}ilicon {C}arbide and {R}elated {M}aterials ({E}{C}{S}{C}{R}{M}), {B}irmingham, {U}{K}; 2018-09-02 -- 2018-09-06}

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