@inproceedings{TUW-281116,
author = {Filipovic, Lado},
title = {{M}odeling and {S}imulation of {A}tomic {L}ayer {D}eposition},
booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
year = {2019},
pages = {323--326},
url = {http://www.iue.tuwien.ac.at/pdf/ib_2019/CP2019_Filipovic_2.pdf},
isbn = {978-1-7281-0938-1},
doi = {10.1109/SISPAD.2019.8870462},
note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {U}dine, {I}taly; 2019-09-04 -- 2019-09-06}
}
Created from the Publication Database of the Vienna University of Technology.