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@inproceedings{TUW-281116,
    author = {Filipovic, Lado},
    title = {{M}odeling and {S}imulation of {A}tomic {L}ayer {D}eposition},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2019},
    pages = {323--326},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2019/CP2019_Filipovic_2.pdf},
    isbn = {978-1-7281-0938-1},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {U}dine, {I}taly; 2019-09-04 -- 2019-09-06}
}



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