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@article{TUW-289481,
    author = {Toifl, Alexander and Quell, Michael and Klemenschits, Xaver and Manstetten, Paul and H{\"o}ssinger, Andreas and Selberherr, Siegfried and Weinbub, Josef},
    title = {{T}he {L}evel-{S}et {M}ethod for {M}ulti-{M}aterial {W}et {E}tching and {N}on-{P}lanar {S}elective {E}pitaxy},
    journal = {{I}{E}{E}{E} {A}ccess},
    year = {2020},
    volume = {8},
    number = {115406},
    pages = {115406--115422},
    url = {http://www.iue.tuwien.ac.at/pdf/ib_2020/JB2020_Toifl_1.pdf},
    doi = {10.1109/ACCESS.2020.3004136}
}



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