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@phdthesis{TUW-293271,
    author = {Berens, Judith},
    title = {{C}arrier {M}obility and {R}eliability of 4{H}-{S}i{C} {T}rench {M}{O}{S}{F}{E}{T}s},
    school = {{I}nstitut f{\"u}r {M}ikroelektronik},
    year = {2020},
    doi = {10.34726/hss.2021.86487}
}