[Back]

@article{TUW-295616,
    author = {Toifl, Alexander and Rodrigues, Francio and Aguinsky, Luiz Felipe and H{\"o}ssinger, Andreas and Weinbub, Josef},
    title = {{C}ontinuum {L}evel-{S}et {M}odel for {A}nisotropic {W}et {E}tching of {P}atterned {S}apphire {S}ubstrates},
    journal = {{S}emiconductor {S}cience and {T}echnology},
    year = {2021},
    volume = {36},
    pages = {045016-1--045016-12},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/JB2021_Toifl_1.pdf},
    doi = {10.1088/1361-6641/abe49b}
}



Created from the Publication Database of the Vienna University of Technology.