@article{TUW-295616,
author = {Toifl, Alexander and Rodrigues, Francio and Aguinsky, Luiz Felipe and H{\"o}ssinger, Andreas and Weinbub, Josef},
title = {{C}ontinuum {L}evel-{S}et {M}odel for {A}nisotropic {W}et {E}tching of {P}atterned {S}apphire {S}ubstrates},
journal = {{S}emiconductor {S}cience and {T}echnology},
year = {2021},
volume = {36},
number = {4},
pages = {045016-1--045016-12},
url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/JB2021_Toifl_1.pdf},
doi = {10.1088/1361-6641/abe49b}
}
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