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@inproceedings{TUW-296474,
    author = {Rodrigues, Francio and Aguinsky, Luiz Felipe and Toifl, Alexander and H{\"o}ssinger, Andreas and Weinbub, Josef},
    title = {{F}eature {S}cale {M}odeling of {F}luorocarbon {P}lasma {E}tching for {V}ia {S}tructures including {F}aceting {P}henomena},
    booktitle = {{B}ook of {A}bstracts of the {I}nternational {W}orkshop on {C}omputational {N}anotechnology ({I}{W}{C}{N})},
    year = {2021},
    pages = {101--102},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/CP2021_Rodrigues_1.pdf},
    isbn = {978-89-89453-30-7},
    note = {talk: {I}nternational {W}orkshop on {C}omputational {N}anotechnology ({I}{W}{C}{N}), {D}aejeon, {K}orea ({V}irtual); 2021-05-24 -- 2021-06-06}
}



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