@phdthesis{TUW-297026,
author = {Toifl, Alexander},
title = {{N}umerical {M}ethods for {T}hree-{D}imensional {S}elective {E}pitaxy and {A}nisotropic {W}et {E}tching {S}imulations},
school = {{I}nstitut f{\"u}r {M}ikroelektronik},
year = {2021},
url = {https://www.iue.tuwien.ac.at/phd/toifl/},
doi = {10.34726/hss.2021.91744}
}