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@inproceedings{TUW-297929,
    author = {Filipovic, Lado and Klemenschits, Xaver},
    title = {{F}ast {M}odel for {D}eposition in {T}renches using {G}eometric {A}dvection},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2021},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/CP2021_Filipovic_5.pdf},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {D}allas, {T}exas ({U}{S}{A}); 2021-09-27 -- 2021-09-29}
}



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