[Back]

@inproceedings{TUW-297931,
    author = {Rodrigues, Francio and Aguinsky, Luiz Felipe and Toifl, Alexander and Scharinger, Alexander and H{\"o}ssinger, Andreas and Weinbub, Josef},
    title = {{S}urface {R}eaction and {T}opography {M}odeling of {F}luorocarbon {P}lasma {E}tching},
    booktitle = {{P}roceedings of the {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D})},
    year = {2021},
    url = {https://www.iue.tuwien.ac.at/pdf/ib_2021/CP2021_Rodrigues_2.pdf},
    note = {talk: {I}nternational {C}onference on {S}imulation of {S}emiconductor {P}rocesses and {D}evices ({S}{I}{S}{P}{A}{D}), {D}allas, {T}exas ({U}{S}{A}); 2021-09-27 -- 2021-09-29}
}



Created from the Publication Database of the Vienna University of Technology.